EECS 500
Arthur Heuer
Friday, September 19th, 2008
MEMS-Micro Electro Mechanical Systems-add sensing and actuation, to the electronic functionality that is the hallmark of the semiconductor revolution. A majority of current commercial devices employ Si as the structural material to take advantage of the extensive Si technology developed for consumer and military devices.
Негізгі бет Materials Science of Silicon MEMS: A Two-Way Street
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