This is an ICP chamber dry etcher simulation using our multiphysics simulation software #samadii.
This tutorial explains:
- Simulation geometry
- Electrics and magnetics fields results
-Gas area results
- Plane results
- Flux
-Gas area after applying an electromagnetic field
-Electron density
- Inlet conditions
- CF, CF+ results
- Measure of the deposition rate on the wafer
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Негізгі бет Ғылым және технология samadii/plasma: ICP Dry Etcher Simulation Analysis (CUDA)
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