- Cleanroom storage and Transport System for Silicon Wafers in cleanroom up to ISO class 4
- Temporary storage of the FOUPs in double depth racks
- Automatic unloading and delivery of the material to be conveyed from mobile trolleys
- Manual recording of FOUP and open cassettes
- Place detection by the camera system
Негізгі бет Warehouse Systems for Cleanroom
Пікірлер: 4